Single wafer / Cluster tool
RTP, CVD, EPI, and Etch chambers are made from Silicon, Alumina, and Quartz. These include a variety of bell jars, isolation chambers, domes, reactor tubes,
liners, rings, shower heads, gas distribution plates, robot blades,
end-effectors, etc. These parts may be machined and/or hot-fabricated by glassblowers, pending design
requirements. These products are manufactured,
cleaned, and packaged to OEM specs.
Note: Hayward Quartz manufactures chamber components on a
direct-to-OEM basis only. OEM specifications are proprietary and confidential.
End-users should contact their
OEM directly for spare parts.